Fizikalne osnove, izrazoslovje, merilne enote in definicije v vakuumski tehniki in tehnologiji
Priprava vakuuma: črpanje plinov, vakuumske črpalke, hitrost črpanja, vrste pretokov plinov
Fizikalno-kemijski procesi na površinah materialov: desorpcija, adsorpcija, sorpcija, segregacija, difuzija, permeacija, razplinjanje materialov
Meritve vakuuma od 1000 mbar do 10-12 mbar, izbira merilnikov tlaka, principi meritev, analiza preostalih plinov z masno spektrometrijo, detekcija puščanja, hitrost puščanja
Vakuumske komponente, sistemi in materiali:
načrtovanje vakuumskega sistema glede na
področje vakuuma; izbira materialov in
komponent
Metode za analizo površin, ki delujejo v ultravisokem vakuumu: rentgenska fotoelektronska spektroskopija (XPS), masna spektrometrija sekundarnih ionov (SIMS), spektroskopija Augerjevih elektronov (AES): fizikalni principi, analizna globina, lateralna ločljivost, občutljivost metod, kvantitativna obdelava podatkov, profilna analiza tankih plasti
Nizkotlačne in atmosferske plazme: termodinamsko neravnovesno stanje plinov,
uporaba plazme za čiščenje, aktivacijo,
funkcionalizacijo in selektivno jedkanje površin
Vakuumska tehnika v inženirstvu površin za
izboljšanje lastnosti površin: priprava in obdelava
površin, nanos PVD in CVD prevlek
Vakuumske tehnologije v metalurgiji, kemijski,
farmacevtski, prehrambni industriji, elektroniki in
elektrooptiki
Introduction in vacuum physics, basic terms, units of measurement, definitions in vacuum techniques and technology
Vacuum generation: pumping of gases, vacuum pumps, pumping speed, types of gas flow
Physical-chemical processes at the surfaces of materials: desorption, absorption, sorption, segregation, diffusion, permeation, outgassing
Vacuum measurement in the range from 1000 mbar to 10-12 mbar, selection of vacuum gauges, analysis of residual gases using mass spectrometry, detection of leaks, leak rate.
Vacuum components, systems and materials, design of vacuum systems for different ranges, selection of materials and components
Surface analytical techniques based on ultrahigh
vacuum: X-ray photoelectron spectroscopy (XPS),
Secondary ion mass spectroscopy (SIMS), Auger
electron spectroscopy (AES), physical principles,
sampling depth, spatial resolution, sensitivity,
quantification, data processing, depth profiling of
thin films
Low pressure and atmospheric plasmas: thermodynamically non-equilibrium state of gas,
applications for cleaning, surface activation, surface functionalization and selective etching
Vacuum techniques in surface engineering: to
improve performance of materials: surface
preparation and treatment, deposition of PVD and CVD coatings
Vacuum technologies in metallurgy, pharmaceutic and food industry, electronics and optoelectronics